PARTICLE BEAM FORMING DEVICE

摘要

Provided is a particle beam forming device that is capable of forming a particle beam, as well as evaluating and controlling a spatial distribution of the formed particle beam. A particle beam forming device for forming either a linear or conical particle beam from a particle source in which particles are dispersed in a gas is provided with: a reduced-pressure vessel (12) in which pressure is reduced; particle beam generating means (3), which has one end arranged outside the reduced-pressure vessel (12) and the other end arranged inside the reduced-pressure vessel (12), and which captures a particle source (2) from outside the reduced-pressure vessel (12) and introduces a particle beam into the reduced-pressure vessel (12); and particle beam evaluating means for evaluating a spatial distribution of the particle beam inside the reduced-pressure vessel (12). It is preferable that the particle beam evaluating means be provided with: light directing means for directing light on the particle beam; light-scattering detection means (14) for detecting scattered light generated when the light that has been directed on the particle beam hits the particles; and signal processing means (15) for recording and processing a signal outputted from the light-scattering detection means (14) in accordance with an intensity and/or a frequency of detection of the scattered light.