发明名称 METHOD FOR MANUFACTURING Sn ALLOY BUMP
摘要 Provided is a method for manufacturing an Sn alloy bump, wherein composition of the Sn alloy bump can be readily controlled. The method for manufacturing an Sn alloy bump formed of an alloy composed of Sn and other one or more types of metals has a step of forming an Sn layer (4a) on an electrode pad (3) in a resist opening (2a) formed on a substrate (1) by electrolytic plating; a step of laminating Sn and an alloy layer (4b) on the Sn layer (4a) by electrolytic plating; and a step of forming an Sn alloy bump (5) by melting the Sn layer (4a) and the laminated alloy layer (4b) after removal of a resist (2).
申请公布号 EP2669937(A4) 申请公布日期 2016.07.27
申请号 EP20120739744 申请日期 2012.01.16
申请人 MITSUBISHI MATERIALS CORPORATION 发明人 HATTA, TAKESHI;MASUDA, AKIHIRO
分类号 H01L21/60;C25D5/10;C25D5/50;C25D7/00;C25D7/12;H01L21/48 主分类号 H01L21/60
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