发明名称 物理量検出デバイス、物理量検出器、および電子機器
摘要 PROBLEM TO BE SOLVED: To provide a physical quantity detection device capable of preventing spuriousness from being generated and improving detection sensitivity.SOLUTION: A physical quantity detection device 100 comprises: a base 10; a movable part 14 provided on the base 10 via a joint 12 and displaced according to a physical quantity; and a physical quantity detection element 20 extending between the base 10 and the movable part 14 in a planar view in a displacement direction. The physical quantity detection element 20 is placed in a groove part 30 provided on the base 10 and the movable part 14.
申请公布号 JP5954531(B2) 申请公布日期 2016.07.20
申请号 JP20120085867 申请日期 2012.04.04
申请人 セイコーエプソン株式会社 发明人 渡辺 潤
分类号 G01P15/10;G01P15/08 主分类号 G01P15/10
代理机构 代理人
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