发明名称 |
MINIATURIZED INTEGRATED MICRO ELECTO-MECHANICAL SYSTEMS (MEMS) OPTICAL SENSOR ARRAY FOR VISCOSITY AND MASS DETECTION |
摘要 |
The present invention relates generally to the field of chemical and biological sensors and in particular to micro electro-mechanical systems (MEMS) sensors for measuring fluid viscosity and detection of minute amounts of chemicals and biological agents in fluids. It is an object of the present invention to provide a sensor that will work in disposable cartridges with remote sensing that can measure dynamic changes of the functionalized cantilevers in liquid and gas environment. |
申请公布号 |
EP3044577(A1) |
申请公布日期 |
2016.07.20 |
申请号 |
EP20130803226 |
申请日期 |
2013.09.09 |
申请人 |
KOC UNIVERSITESI |
发明人 |
UREY, HAKAN;YARALIOGLU, GOKSENIN |
分类号 |
G01N29/02 |
主分类号 |
G01N29/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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