| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holding apparatus which prevents the occurence of cracks and chips in a chuck body even if temperature rise and temperature fall of the substrate are repeated and achieves good temperature controllability of the substrate.SOLUTION: A substrate holding apparatus of this invention holds a substrate to be processed and includes: a base 1 having cooling means; an insulation plate 3 fixed to an upper surface of the base; and a chuck body 4 which is installed on an upper surface of the insulation plate with positive and negative electrodes 42a, 42b and heating means 41 included therein, is formed by a dielectric material, and has an upper surface on which the substrate W is placed. A sheet member 2, which has a predetermined thickness and closely contacts with the base and the plate and thereby reducing the heat resistance, is disposed between an upper surface of the base and a lower surface of the insulation plate. |
