发明名称 GROWTH OF A UNIFORMLY DOPED SILICON INGOT BY DOPING ONLY THE INITIAL CHARGE
摘要 The present invention relates to a method of growing a silicon ingot comprising a dopant material having a segregation coefficient of k, wherein the concentration of the dopant is axially substantially uniform throughout the ingot. The method comprises the steps of providing a crucible having an inner growth zone in fluid communication with an outer feed zone, and the inner growth zone and the outer feed zone have cross-sectional areas that are can be used to determine conditions for maintaining dopant uniformity for the specific dopant material used. A crystalline growth system for growing at least one uniformly doped silicon ingot is also disclosed.
申请公布号 EP2705178(B1) 申请公布日期 2016.07.06
申请号 EP20120781614 申请日期 2012.05.04
申请人 GTAT IP HOLDING LLC 发明人 JOHNSON, BAYARD, K.
分类号 C30B15/04;C30B15/12;C30B29/06 主分类号 C30B15/04
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