发明名称 画像形成装置及び寸法測定装置
摘要 The purpose of the present invention is to provide an image forming device and the like that is capable of forming a proper integrated signal even when an image or a signal waveform is acquired from a pattern having the possibility of preventing proper matching, such as a repetition pattern, a shrinking pattern, and the like. In order to achieve the purpose, there is proposed an image forming device that forms an integrated image by integrating a plurality of image signals and that is provided with: a matching processing section that performs a matching process between the plurality of image signals; an image integration section that integrates the plurality of image signals for which positioning has been performed by the matching processing section; and a periodicity determination section that determines a periodicity of a pattern contained in the image signals. The matching processing section varies a size of an image signal area for the matching in accordance with a determination by the periodicity determination section.
申请公布号 JP5948074(B2) 申请公布日期 2016.07.06
申请号 JP20120027963 申请日期 2012.02.13
申请人 株式会社日立ハイテクノロジーズ 发明人 高杉 容徳;酒井 計;山口 聡;平尾 和之
分类号 H01J37/22;G01B15/00;G01B15/04 主分类号 H01J37/22
代理机构 代理人
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