| 发明名称 |
HYBRID ORGANIC/INORGANIC THIN FILMS AND METHOD OF MANUFACTURING SAME |
| 摘要 |
The present invention relates to an organic-inorganic hybrid thin film and a method for preparing the same and more specifically to an organic-inorganic hybrid thin film including a stable new functional group and a method for preparing the organic-inorganic hybrid thin film that is formed by the molecular layer deposition method alternately using inorganic precursor and organic precursor. |
| 申请公布号 |
EP3040442(A1) |
申请公布日期 |
2016.07.06 |
| 申请号 |
EP20130892196 |
申请日期 |
2013.11.04 |
| 申请人 |
IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY);BASF COATINGS GMBH |
发明人 |
SUNG, MYUNG MO;HAN, KYU SEOK |
| 分类号 |
C23C16/00;C23C16/448 |
主分类号 |
C23C16/00 |
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