| 摘要 |
An apparatus and method for effecting and changing optical distortions is disclosed. The apparatus includes a beam imaging apparatus including a first deformable mirror, a second deformable mirror, and a beam-steering apparatus. The beam-steering apparatus includes a plurality of planar tiltable mirrors arranged to define a radiation beam path therebetween, wherein the plurality of planar tiltable mirrors comprises at least three tiltable mirrors. A mirror drive system is configured to tilt each respective planar mirror about its respective axis of rotation or axes of rotation and a controller is configured to control deformation of a reflective surface of the first and the second deformable mirrors. |
