发明名称 CASSETTE
摘要 PROBLEM TO BE SOLVED: To activate a lock mechanism for preventing a protrusion of a work set due to access from above.SOLUTION: A cassette (2) comprises: a side plate having an insertion groove (20b) for inserting a work set (W) formed therein; and a lock mechanism (26) for preventing a protrusion of the work set inserted into the insertion groove. The lock mechanism has a lock bar (27) having a second insertion groove (27b) allowing the insertion groove to communicate therewith formed at the same interval as the interval of the insertion groove therein, and a spring mechanism (28) for energizing the lock bar upward and protruding the lock bar from an upper surface, which makes the second insertion groove and the insertion groove uneven in a vertical direction by pushing the lock bar downward so as to block the insertion groove.SELECTED DRAWING: Figure 2
申请公布号 JP2016119354(A) 申请公布日期 2016.06.30
申请号 JP20140257109 申请日期 2014.12.19
申请人 DISCO ABRASIVE SYST LTD 发明人 NAKANISHI YUJI
分类号 H01L21/673 主分类号 H01L21/673
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