| 摘要 |
The invention relates to a particle beam generator (10) having a housing (11), which comprises a first housing segment (12), which is adapted to be attached to a particle beam processing device (100) in such a way that the first housing segment can be rotated about a first axis of rotation (D1), and a second housing segment (14), which is attached to the first housing segment (12) in such a way that the second housing segment can be rotated about a second axis of rotation (D2) and which is connected to the first housing segment in a vacuum-tight manner. A beam-producing device (9) is attached in the second housing segment (14) and is adapted to produce a particle beam along a beam axis (S1). The second axis of rotation (D2) extends at an angle α to the first axis of rotation (D1). |
