| 摘要 |
PROBLEM TO BE SOLVED: To provide a structure where an XY stage is disposed in a vacuum chamber, e.g., a laser desorption ionization apparatus based on MALDI method, while spaced apart by a predetermined distance from a specific member in a vertical direction, in which change in the distance between the XY stage and the specific member due to change in the ambient environment can be reduced as much as possible.SOLUTION: By a structure for supporting the base 11 of an XY stage 10 for a holding member 23 which holds a specific member 31 by projecting inward in a vacuum chamber 20, via a support member 40, in such a state that a cavity is provided for the bottom plate 21 and the sidewall 22 of the vacuum chamber 20, the bottom plate 21 and the sidewall 22 of the vacuum chamber 20 are brought into vacuum adiabatic state so as not to be affected by the ambient temperature, and so that variation in the dimensions of the vacuum chamber 20 due to variation in the ambient temperature or atmospheric pressure does not affect the distance between the specific member 31 and the XY stage 10 in the vertical direction. |
