发明名称 圧電素子の製造方法、液体噴射ヘッドの製造方法、液体噴射装置の製造方法、超音波デバイスの製造方法及びセンサーの製造方法
摘要 An electrode is provided with a lanthanum nickelate film which is formed through a chemical solution deposition method using a lanthanum nickelate film forming composition which is obtained by heating a mixed solution obtained by mixing at least lanthanum acetate, nickel acetate, acetic acid, and water, a piezoelectric layer is provided on the lanthanum nickelate film and is formed of a complex oxide having a perovskite structure which contains at least Pb, Ti, and Zr, and a half-width (&thetas;) of a peak derived from a (100) plane and/or a peak derived from a (001) plane measured using an X-ray rocking curve method is 6.0 degrees or less.
申请公布号 JP5943178(B2) 申请公布日期 2016.06.29
申请号 JP20110264139 申请日期 2011.12.01
申请人 セイコーエプソン株式会社 发明人 板山 泰裕
分类号 H01L41/319;H01L41/047;H01L41/187;H01L41/29;H01L41/318 主分类号 H01L41/319
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