| 摘要 |
A substrate holding assistant member for assisting vacuum-suction of a substrate on a mounting table includes an upper covering wall portion and a side surrounding wall portion. The upper covering wall portion has intake holes or gas ejection holes for ejecting a gas toward the substrate and is configured to cover a space above the substrate mounted on the mounting table. The side surrounding wall portion is coupled to an outer peripheral portion of the upper covering wall portion and configured to cover a side of the substrate. A gap between an inner peripheral surface of the side surrounding wall portion and an outer peripheral side surface of the substrate is smaller than a gap between an uppermost portion of the substrate and a bottom surface of the upper covering wall portion. |
