发明名称 スレッドを使用した層のパターニング
摘要 A method for patterning an article, the article comprising a first layer of a first material, a first major surface of the first layer being in intimate contact with some or all of a first major surface of a second layer of a second different material the method comprising providing a first thread carrying a first species to remove at least a portion of the first layer, and providing a second thread aligned with and adjacent the first thread and contacting the first and second threads with the first layer to remove at least part of the first layer.
申请公布号 JP5940525(B2) 申请公布日期 2016.06.29
申请号 JP20130517543 申请日期 2011.07.04
申请人 ケンブリッジ エンタープライズ リミテッド 发明人 ニゲマン、マイケル
分类号 H01L51/48;H01L21/306 主分类号 H01L51/48
代理机构 代理人
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