| 摘要 |
PROBLEM TO BE SOLVED: To provide an opening/closing device for a lid of a chamber body, and a multi-chamber processing system.SOLUTION: At diagonal positions of the lid, a first support part and a second support part are formed and at both sides of a position where the chamber body is installed, a first guide member and a second guide member in a linear shape are provided which are in parallel with each other. The first guide member extends closer to a side part of the chamber body with a position in the vicinity of a lower side of the first support part as a base point, and the second guide member extends away from the chamber body with a position in the vicinity of a lower side of the second support part as a base point. A virtual line connecting the first support part and the second support part is inclined in extension directions of the guide members. A first traverse machine and a second traverse machine are provided in a freely movable manner along the first guide member and the second guide member. The first support part and the second support part are supported by lifts erected in the first traverse machine and the second traverse machine, and the lid is supported in a freely movable manner in the extension directions of the guide members. |
