| 主权项 |
1. A solar cell implantation system for fabricating interdigitated solar cells, comprising:
an implant chamber, comprising: a plasma region and a plasma source configured to provide plasma in the plasma region, an implant region for simultaneously implanting plurality of solar cells with ions from the plasma region, and a grid assembly separating the plasma region and the implant region and comprising a plurality of apertures configured to allow ions from the plasma region to pass therethrough to the implant region; a multi-stage differentially pumped system comprising a plurality of increased vacuum stages leading to the implant region, and a plurality of reduced vacuum stages leading away from the implant region; and, a conveyor system for transporting the plurality of solar cells with physical masks through the multi-stage differentially pumped system, and for positioning the solar cells with the physical masks underneath the grid assembly to be simultaneously implanted at the implant stage through the masks. |
