Apparatus For Improving Temperature Uniformity Of A Workpiece

摘要

An apparatus and method for improving the temperature uniformity of a workpiece during processing is disclosed. The apparatus includes a ring heater assembly disposed along the outer circumference of the platen. The ring heater assembly includes heating elements disposed therein or thereon, where these heating elements create heat, which serves to warm the outer edge of the workpiece. In some embodiments, the ring heater assembly extends beyond the edge of the workpiece and may be exposed to the ion beam.

主权项

1. A workpiece holding and heating apparatus, comprising:
a platen; and a ring heater assembly surrounding an outer circumference of the platen, the ring heater assembly comprising a protective shield on a top surface and a heating element disposed beneath the protective shield.