发明名称 OXIDE PRECURSOR, OXIDE LAYER, SEMICONDUCTOR ELEMENT, ELECTRONIC DEVICE, METHOD FOR PRODUCING OXIDE LAYER, AND METHOD FOR PRODUCING SEMICONDUCTOR ELEMENT
摘要 [Problem] To provide an aliphatic polycarbonate, an oxide precursor, and an oxide layer with which stringiness can be controlled when forming, using a printing method, a thin film that can be employed in an electronic device or a semiconductor element. [Solution] This oxide precursor is obtained by dispersing a metal compound, which forms a metal oxide when oxidized, in a solution containing a binder that comprises aliphatic polycarbonates (and may also contain unavoidable impurities), wherein the ratio of aliphatic polycarbonate having a molecular weight of 6,000-400,000, inclusive, to all the aliphatic polycarbonates is 80 mass% or more. As a result, as shown in FIG. 1, a good pattern that can be used in the production of a semiconductor element can be formed.
申请公布号 WO2016098423(A1) 申请公布日期 2016.06.23
申请号 WO2015JP78158 申请日期 2015.10.05
申请人 NATIONAL UNIVERSITY CORPORATION JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY;SUMITOMO SEIKA CHEMICALS CO., LTD. 发明人 SHIMODA, TATSUYA;INOUE, SATOSHI;FUKADA, KAZUHIRO;NISHIOKA, KIYOSHI;FUJIMOTO, NOBUTAKA;SUZUKI, MASAHIRO
分类号 H01L21/368;C23C18/12;H01L21/288;H01L21/316;H01L21/336;H01L29/786 主分类号 H01L21/368
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