PROBE DEVICE AND PROBE METHOD

摘要

PROBLEM TO BE SOLVED: To provide a probe device capable of providing a user with information useful for setting a control parameter when operating a probe device and probe method.SOLUTION: The probe device includes image generation means for acquiring an actually measured position of each chip on a wafer and generating an image to visually display an amount of deviation of the actually measured position of each chip of the wafer. The image generation means generates an image representing an inclination of a continuous positional deviation amount of each chip accompanying continuous extension of a dicing sheet by dicing in a region corresponding to each chip.SELECTED DRAWING: Figure 10