NANO PARTICLES LAMINATION SYSTEM USING NANO-MICRO MIST

摘要

The present invention relates to a nanoparticle layering system using nano-micro mist. More specifically, the nanoparticle layering system comprises: a nano-mist flocculation step of flocculating nanoparticles dispersed in a solution including a solvent into a nano-mist form; a nano-mist transfer step of transferring the flocculated nano-mist from a solution supply part to a chamber; a mist layering step of layering the nano-mist transferred during the nano-mist transfer step on a wafer; and a homogenization step of uniformly layering nanoparticles in the layered mist on the wafer by rotating the wafer, and adjusting the temperature of the wafer. The nanoparticle layering system is able to manufacture a thin film composed of nanoparticles.