DELIVERY DEVICE, MANUFACTURING SYSTEM AND PROCESS OF MANUFACTURING

摘要

A manufacturing system and a manufacturing process of a delivery device are disclosed. The delivery device includes: a feed tube; and a chemical vapor deposition coating formed from decomposition of dimethylsilane applied over an inner surface of the feed tube. The manufacturing system includes: the delivery device; and a chamber for selectively performing fluid communication with the delivery device. The manufacturing process uses the manufacturing system to produce a product.