| 摘要 |
The present invention provides a plasma generating device that improves plasma generating efficiency for the power used and can further accommodate changes in plasma generating state because of changes in conditions of surroundings and the like. The present invention is a plasma generating device provided with an electromagnetic wave radiating device (13), which has an electromagnetic wave generating device (31) that oscillates electromagnetic waves and a radiating antenna (16) that radiates electromagnetic waves oscillated by the electromagnetic wave generating device (31), and a control device (35) that controls the electromagnetic wave radiating device (13). The plasma generating device is characterized by the electromagnetic wave radiating device (13) being provided with a power detector (15) that detects traveling wave power output by the electromagnetic wave generating device (31) and reflected wave power reflected from the radiating antenna (16) and the control device (35) automatically controlling the oscillation pattern for the electromagnetic waves on the basis of the proportion of the value for the reflected wave power to the value for the traveling wave power detected by the power detector (15). |
