DVC UTILIZING MEMS RESISTIVE SWITCHES AND MIM CAPACITORS

摘要

The present invention generally relates to a MEMS DVC utilizing one or more MIM capacitors. The MIM capacitor may be disposed between the MEMS device and the RF pad or the MIM capacitor may be integrated into the MEMS device itself. The MIM capacitor ensures that a low resistance for the MEMS DVC is achieved.

主权项

1. A MEMS DVC, comprising:
an RF pad disposed over a substrate; a MEMS device disposed over the substrate, the MEMS device having one or more switching elements disposed within a cavity formed over the substrate, the MEMS device further comprising an RF electrode disposed within the substrate, wherein the one or more switching elements are movable from a position in electrical contact with the RF electrode and a position spaced from the RF electrode; and a MIM capacitor disposed over the substrate, the MIM capacitor coupled between the RF pad and the MEMS device.