PROBE APPARATUS AND PROBE METHOD

摘要

(PURPOSE) There is provided a probe device, which is capable of aligning a pair of cameras in a short period of time by using an optical means without using a mechanical target. (CONSTITUTION) In a probe device (100), a projection optic unit (67) of a lower photographing unit (35) causes light emitted from a projection optical source (81) to generate an optical target mark when passing through a target (65). The target mark is projected on an imaging position (P) and an imaging portion (61a) of a lower camera (61) by the light emitted from the projection optical source (81). Since an imaging portion (91a) of an upper camera (91) and the imaging position (P) are arranged at optically conjugate positions, the target mark imaged on the imaging position (P) is also projected on the imaging portion (91a) of the upper camera (91).