发明名称 色収差補正装置及び色収差補正装置の制御方法
摘要 The chromatic aberration correcting device has two multipole lenses for generating the quadrupole fields, while each of the two relay lenses has a focal length (f). The multipole lenses are arranged on the opposite sides of the relay lenses that are separated by a distance of 2f. The distance between the former multipole lens and the former relay lens is f-delta1, while the distance between the latter relay lens and the latter multipole lens is f-delta2. An auxiliary lens is arranged between the relay lenses. The optical axis is measured along the length between the multipole lenses. An independent claim is included for a method for controlling a chromatic aberration correcting device.
申请公布号 JP5934517(B2) 申请公布日期 2016.06.15
申请号 JP20120038287 申请日期 2012.02.24
申请人 日本電子株式会社 发明人 細川 史生
分类号 H01J37/153 主分类号 H01J37/153
代理机构 代理人
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