| 摘要 |
PROBLEM TO BE SOLVED: To provide a cantilever type probe which has good stress dispersion characteristics and is strong to a lateral load, and a probe card.SOLUTION: A probe 100 is a cantilever type prove which includes a tip end portion 5 equipped with a contact 50 contacting with an electrode of an inspection object W, a body portion 1 connected with a wiring substrate 6; and a beam portion 3 formed by a conductive material, and coupling the body portion 1 and the tip end portion 5. In the thickness direction of the probe, the beam portion 3 is equipped with an upper layer 31 disposed on the body portion 1 side, a lower layer 32 disposed on the contact side, and an intermediate layer 33 disposed between the upper layer 31 and the lower layer 32. On the upper layer 31 and the lower layer 33, narrow width portions 31b and 33b having total dimensions of the conductive material in a Y-direction smaller than total dimensions of the conductive material in the intermediate layer 32 are respectively provided. In an X-direction, the narrow width portions 31b and 33b are disposed between the tip end portion 5 and the body portion 1.SELECTED DRAWING: Figure 3 |
