| 摘要 |
PROBLEM TO BE SOLVED: To provide an aluminum nitride substrate having a smooth surface and little warpage of a substrate outer peripheral part as well as little warpage of the whole, in an unprocessed state after firing, and having excellent characteristics, and to provide a method for manufacturing the same.SOLUTION: Concerning this aluminum nitride sintered substrate, in the unprocessed state after firing, warpage of the whole substrate is ≤5 μm/inch as shown in Fig.1, and the absolute value of warpage of the outer peripheral part in the range within 5 mm from the periphery is ≤10 μm at the maximum and ≤6 μm on the average, and further the surface roughness (Ra) is in the range of 0.1-0.2 μm. |
