METHODS OF DECIDING STEADY OPERATIONS OF APPARATUSES AFTER MAINTENANCE

摘要

Disclosed is a method for determining the steady operation of equipment after maintenance, which comprises the steps of: designating equipment to be maintained; switching the equipment to be maintained to a non-operation state so as not to put general wafer lots into the equipment to be maintained; maintaining the equipment; selecting a sample wafer lot, which is to be put into the maintained equipment, from the general wafer lots; generating a test wafer lot by extracting some wafers from the sample wafer lot; performing a test process by putting the test wafers of the test wafer lot into the maintained equipment; determining whether the test process is stably performed by entirely or selectively measuring the test wafers in which the test process is completed; switching the maintained equipment to a steady operation state so as to normally put the general wafer lots into the maintained equipment when it is determined that the test process is stably performed; and maintaining the maintained equipment again or switching the maintained equipment to the non-operation state when it is determined that the test process is not stably performed. The method of the present invention can reduce maintenance time and waiting time.