| 摘要 |
PROBLEM TO BE SOLVED: To suction-hold a plate-like workpiece to a holding surface without changing a chuck table when suction-holding the plate-like workpiece of a different shape.SOLUTION: A chuck table 1 includes a first suction part 2, second suction parts 3a, 3b, and a third suction part 4. These suction parts have a first communicating hole 6, second communicating holes 7, and a third communicating hole 8 respectively. A machining device 100 having the chuck table 1 includes first piping 11, second piping 12 and third piping 13 for connecting the respective communicating holes to a suction source 9, and a first valve 110, a second valve 120 and a third valve 130 disposed at the respective piping. The opened/closed state of these valves is switched to change the area of a holding surface to which a plate-like workpiece is suction-held. Even the plate-like workpiece of a different shape can thereby be suction-held to the chuck table 1 without needing to change the chuck table 1. |
