| 发明名称 |
FLOURINE-CONTAINING COMPOUND, SUBSTRATE FOR PATTERNING, PHOTODEGRADABLE COUPLING AGENT, PATTERNING METHOD, AND COMPOUND |
| 摘要 |
A fluorine-containing compound represented by General formula (1), wherein X represents a halogen atom or an alkoxy group, R1 represents a hydrogen atom or a linear, branched, or cyclic alkyl group having 1 to 10 carbon atoms, Rf1 and Rf2 are each independently a fluorinated alkoxy group, and n represents an integer of 0 or more.; |
| 申请公布号 |
US2016152642(A1) |
申请公布日期 |
2016.06.02 |
| 申请号 |
US201615013193 |
申请日期 |
2016.02.02 |
| 申请人 |
Kanagawa University ;NIKON CORPORATION |
发明人 |
YAMAGUCHI Kazuo;KAWAKAMI Yusuke |
| 分类号 |
C07F7/18;G03F7/20;C07D207/46 |
主分类号 |
C07F7/18 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A fluorine-containing compound represented by the following General formula (1): wherein X represents a halogen atom or an alkoxy group, R1 represents a hydrogen atom or a linear, branched, or cyclic alkyl group having 1 to 10 carbon atoms, Rf1 and Rf2 are each independently a fluorinated alkoxy group, and n represents an integer of 0 or more. |
| 地址 |
Yokohama-shi JP |
