| 摘要 |
PROBLEM TO BE SOLVED: To prevent a tool for substrate processing from being fallen from a tool holder.SOLUTION: A tool for substrate processing includes: a base plate and a cover plate which sandwich and hold a tool for substrate processing having: a tool body in which a holding part held by a tool holder of a substrate processing device is formed in at least one part; an edge part formed at one end side of the tool body; and an engagement part formed at the other end side of the tool body and protruding from a surface of the tool body. In each of the base plate and the cover plate, a tool holding part, which contacts with the holding part of the tool and holds the tool, and a relief part, which is located at the upper side of the tool holding part and does not contact with the tool engagement part, are formed.SELECTED DRAWING: Figure 5 |
