SUBSTRATE HOLDING DEVICE, SUBSTRATE TRANSPORT DEVICE, PROCESSING ARRANGEMENT AND METHOD FOR PROCESSING A SUBSTRATE

摘要

In accordance with various embodiments, provision is made of a substrate holding device (100), wherein the latter may comprise the following: a carrier plate (102) with a recess (112), the recess (112) extending from an upper side (102a) of the carrier plate (102) to a lower side (102b) of the carrier plate (102) through the carrier plate (102); a holding frame (132a), which has a frame opening (132) and a support area (111a), surrounding the frame opening (132), for holding a substrate (120) in the recess (112); wherein the holding frame (132a) inserted into the recess (112) lies on the carrier plate (102) in sections.