| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem, wherein, when a salient formed on a diaphragm and an electric mechanical conversion element are jointed, the diaphragm is curved to increase the thickness of an adhesive of a central part thereby to lower a displacement transmission efficiency for the diaphragm.SOLUTION: In a diaphragm member 3, a vibration area 30 or a diaphragm for forming the wall surface of a portion of an individual liquid chamber 6 is formed with a salient 31 or an island-shaped thick part to be jointed to a piezoelectric element 12A by an adhesive. The salient 31 includes three salient portions 31a, 31b and 31c to become joint faces 33a, 33b and 33c individually to the piezoelectric element 12A. Between the adjoining salient parts 31a and 31b and between the salient parts 31b and 31c, individually, there are formed grooves 34 and 34. The three salient portions 31a, 31b and 31c are arranged, and the height of the salient 31b of the central portion is higher than the remaining salient parts 31a and 31c.SELECTED DRAWING: Figure 7 |
