发明名称 |
HEXACOORDINATE SILICON-CONTAINING PRECURSORS FOR ALD/CVD SILICON-CONTAINING FILM APPLICATIONS |
摘要 |
Disclosed are hexacoordinate silicon-containing precursors, methods of synthesizing the same, and methods of using the same to deposit silicon-containing films using vapor deposition processes for manufacturing semiconductors, photovoltaics, LCD-TFT, flat panel type devices, refractory materials, or aeronautics. The hexacoordinate silicon-containing molecule have the following formula: (I), wherein each L1, L2, L3 and L4 is independently selected from oxygen or nitrogen atoms; L1 and L2 are joined together via a carbon bridge having one to three carbon atoms; L3 and L4 are joined together via a carbon bridge having one to three carbon atoms; L1, L2 and the carbon bridge forming a monoanionic ligand bonded to silicon; and L3, L4 and the carbon bridge form a monoanionic ligand bonded to silicon. |
申请公布号 |
US2016152640(A1) |
申请公布日期 |
2016.06.02 |
申请号 |
US201414905859 |
申请日期 |
2014.07.18 |
申请人 |
KUCHENBEISER Glenn;DUSSARRAT Christian;PALLEM Venkateswara R.;L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE ;AMERICAN AIR LIQUIDE, INC. |
发明人 |
KUCHENBEISER Glenn;DUSSARRAT Christian;PALLEM Venkateswara R. |
分类号 |
C07F7/02;C23C16/455 |
主分类号 |
C07F7/02 |
代理机构 |
|
代理人 |
|
主权项 |
1. A hexacoordinate silicon-containing molecule having the following formula:wherein
each L1, L2, L3 and L4 is a nitrogen atom or L1 and L4 are a nitrogen atom and L2 and L3 are an oxygen atom; L1 and L2 are joined together via a carbon bridge having one to three carbon atoms; L3 and L4 are joined together via a carbon bridge having one to three carbon atoms; L1, L2 and the carbon bridge forming a monoanionic ligand bonded to silicon; and L3, L4 and the carbon bridge form a monoanionic ligand bonded to silicon. |
地址 |
Newark DE US |