发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
摘要 A semiconductor device (100A) is provided with: a gate electrode (3); an oxide semiconductor layer (5); a thin-film transistor (101) including a gate insulating layer (4), a source electrode (7S), and a drain electrode (7D); an inter-layer insulating layer (11) arranged so as to cover the thin-film transistor (101) and come into contact with a channel area (5c) of the thin-film transistor (101); and a transparent electroconductive layer (19) arranged on the inter-layer insulating layer (11), the source electrode (7S) and the drain electrode (7D) each having a copper layer (7a), and the device being further provided with a copper oxide film (8) arranged between the source and drain electrodes and the inter-layer insulating layer (11). The inter-layer insulating layer (11) covers the drain electrode (7D) with the copper oxide film (8) interposed therebetween. The transparent electroconductive layer (19) is directly connected to the copper layer (7a) of the drain electrode (7D) inside a contact hole (CH1) formed in the inter-layer insulating layer (11), without the copper oxide film (8) being interposed therebetween.
申请公布号 WO2016084700(A1) 申请公布日期 2016.06.02
申请号 WO2015JP82539 申请日期 2015.11.19
申请人 SHARP KABUSHIKI KAISHA 发明人 KITAGAWA HIDEKI;DAITOH TOHRU;IMAI HAJIME;OCHI HISAO;FUJITA TETSUO;KIKUCHI TETSUO;KAWASHIMA SHINGO;SUZUKI MASAHIKO
分类号 H01L29/786;G02F1/1343;G02F1/1368;H01L21/28;H01L21/283;H01L21/306;H01L21/312;H01L21/316;H01L21/336;H01L21/768;H01L23/532 主分类号 H01L29/786
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