发明名称 |
SUBSTRATE BONDING DEVICE, SUBSTRATE BONDING METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD |
摘要 |
In the present invention a first substrate and a second substrate are bonded to each other with an adhesive layer therebetween. A first roller presses the second substrate against the first substrate while the second substrate is subjected to bending deformation and, while rolling, the first roller applies the entire surface of the second substrate to the first substrate by means of a first force. A second roller, while rolling, applies a second force that is greater than the first force to the laminated body formed by the application of the entire surface of the second substrate to the first substrate, thereby pressure bonding the entire surface of the second substrate to the first substrate. |
申请公布号 |
WO2016084703(A1) |
申请公布日期 |
2016.06.02 |
申请号 |
WO2015JP82556 |
申请日期 |
2015.11.19 |
申请人 |
ASAHI GLASS COMPANY, LIMITED |
发明人 |
UTSUGI HIROSHI;ITO YASUNORI;OTSUBO YUTAKA |
分类号 |
H01L21/683;B29C63/02;B32B7/06;B32B37/10;C03C27/12;G02F1/13;G02F1/1333 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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