发明名称 試料ホルダー
摘要 PROBLEM TO BE SOLVED: To provide a sample holder tip and a sample holder capable of further expanding an inclination angle by utilizing a space between pole pieces.SOLUTION: The sample holder tip includes: a sample installation pedestal; a sample fixing part which fixes a sample; and a fulcrum for being connected to a link member. When a position of a sample surface is arranged on a focal surface of an electron beam, the fulcrum is provided on the surface except the sample surface. Moreover, in a preferable embodiment of the sample holder tip, the fulcrum exists on an axis except a holder axis of the sample holder.
申请公布号 JP5927235(B2) 申请公布日期 2016.06.01
申请号 JP20140102032 申请日期 2014.05.16
申请人 株式会社メルビル 发明人 宮崎 裕也
分类号 H01J37/20 主分类号 H01J37/20
代理机构 代理人
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