发明名称 UNIT FOR SUPPLYING GAS AND APPARATUS FOR SUPPLYING FLUID USING THE SAME
摘要 Disclosed is a gas supply unit. The gas supply unit comprises a gas inlet for feeding gas from the outside; a temperature adjusting unit for adjusting temperature of the gas fed through the gas inlet; a humidity adjusting unit for adjusting humidity of the gas fed through the gas inlet; an outlet for discharging gas passing through the temperature adjusting unit and the humidity adjusting unit; and a drain water tank structure disposed in a lower side of the temperature adjusting unit. The drain water tank structure comprises: a water tank; a diaphragm for dividing the water tank into a water collecting section and a water level sensing section, and having a liquid moving opening part formed in a lower side thereof to connect the water collecting section and the water level sensing section so as to make a water level of the water collecting section and a water level of the water level sensing section identically maintained; and a sensor unit disposed in the water level sensing section, and measuring a water level of the water tank. Lifespan and durability of the sensor unit are ensured, and malfunction of the sensor unit is prevented. Also, the sensor unit may be easily repaired and replaced.
申请公布号 KR20160061088(A) 申请公布日期 2016.05.31
申请号 KR20140163553 申请日期 2014.11.21
申请人 MELCON CO., LTD. 发明人 KIM, DONG HUN
分类号 G03F7/20;H01L21/027 主分类号 G03F7/20
代理机构 代理人
主权项
地址