INSPECTION DEVICE AND PRODUCTION MANAGEMENT METHOD

摘要

PROBLEM TO BE SOLVED: To provide an inspection device capable of quantitatively detecting the adhesion amounts of foreign matter and residues, even in fine foreign material and residues adhering to the inside of a container.SOLUTION: The inspection device is an inspection device 1 for inspecting the foreign matter adhered to the inside of the container and includes a light source 11 for irradiating the inner surface of the container 20 with excitation light, an imaging part 10 for photographing the fluorescent image of fluorescence emitted by the foreign matter by irradiation with the excitation light, and a detection part 13 for detecting the foreign matter adhering to the inside of the container. At least, the inner surface of the container is made of a material not emitting the fluorescence by the irradiation with the excitation light and the foreign matter includes a material emitting the fluorescence by the irradiation with the excitation light.SELECTED DRAWING: Figure 1