LEAKAGE INSPECTION METHOD, LEAKAGE INSPECTION DEVICE, AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To enhance the efficiency of inspection by excluding unnecessary correction processing.SOLUTION: The leakage inspection method includes: a step (a) of sealing the inside of an inspection object; a step (b) of measuring the internal pressure of the inspection object to obtain a pressure measurement value; a step (c) of determining whether or not the pressure measurement value is coincident with a correction requiring condition; a step (d) of determining whether to correct the pressure measurement value, and for, when the pressure measurement value is determined to be corrected, correcting the pressure measurement value to obtain a pressure correction value; and a step (e) of determining the leakage of the inspection object on the basis of the pressure measurement value or the pressure correction value.SELECTED DRAWING: Figure 2