| 摘要 |
PROBLEM TO BE SOLVED: To provide a polarization processing device that can uniformly perform polarization processing in a surface of an actuator substrate having an electromechanical conversion element.SOLUTION: There is provided a polarization processing device that performs polarization processing on an actuator substrate including a substrate, a base film formed on the substrate, at least one lower electrode formed on the base film, an electromechanical conversion film formed on the lower electrode, and at least one upper electrode formed on the electromechanical conversion film, and has a sample stage 44 that is grounded and holds the actuator substrate. The area of the sample stage 44 is larger than the area of the actuator substrate, and an electric field correction member 40 including at least the same material as the substrate is provided on a part outside the outer periphery of the actuator substrate.SELECTED DRAWING: Figure 3 |
