| 摘要 |
PROBLEM TO BE SOLVED: To provide: a sample holder for a transmission type electron microscope, which can be shared by FIB in preparing a sample and TEM in observation, which has adequate rigidity and enables the prevention of sample oxidation; and a method for observation by a transmission type electron microscope.SOLUTION: A sample holder which can be shared by a transmission type electron microscope and a focused ion beam machining device comprises: a cylindrical hull; first and second openings respectively formed in partial regions opposed to each other in the cylindrical hull, and arranged so that an electron beam or ion beam is incident on the sample holder through any one of the first and second openings; a sample support unit provided in a space in the hull between the first and second openings, and arranged to be able to rotate a sample around its rotation axis of which the direction is coincident with an axis direction of the sample holder; and an atmosphere cutoff member which closes the first and second openings so as to cut off the space from an ambient air when neither the electron beam nor the ion beam is applied.SELECTED DRAWING: Figure 1 |
