| 摘要 |
PROBLEM TO BE SOLVED: To provide a physical quantity sensor having excellent detection characteristics, and electronic equipment and a mobile body including the physical quantity sensor.SOLUTION: A physical quantity sensor 10 includes: a fixed part; a drive part vibrating along an X axis direction; a first beam connecting the fixed part and the drive part; a detection part vibrating by Coriolis force acting on the drive part, along a Z axis direction orthogonal to the X axis direction; a second beam connecting the drive part and the detection part; and compensation electrodes 61, 62 generating electrostatic attraction force along the Z axis direction to the drive part. The drive part has a plurality of non-electrode parts constituted by holes or recesses opening on the compensation electrodes 61 62 side; the plurality of non-electrode parts is arranged in the X axis direction; and the compensation electrodes 61, 62 include a plurality of electrode parts arranged in the X axis direction.SELECTED DRAWING: Figure 1 |
