发明名称 PRODUCTION OF A VOLUME OBJECT BY LITHOGRAPHY, HAVING IMPROVED SPATIAL RESOLUTION
摘要 The present invention concerns a method for producing a volume object by lithography, comprising a projection of the projection image onto a plane to be illuminated of the layer of material, which involves: moving the mask in a movement having a component along an oblique axis forming an angle with the plane to be illuminated, and transforming a movement of the mask having a component along the oblique axis forming the angle with the plane to be illuminated into a displacement of the projection image on the plane to be illuminated along the first direction of the displacement contained in the plane to be illuminated by means of a mirror that reflects the projection image coming from the mask towards the plane to be illuminated.
申请公布号 HK1211540(A1) 申请公布日期 2016.05.27
申请号 HK20150112424 申请日期 2015.12.17
申请人 PRODWAYS 发明人 ALLANIC, ANDR-LUC
分类号 B29C 主分类号 B29C
代理机构 代理人
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