| 摘要 |
PROBLEM TO BE SOLVED: To provide a dynamic quantity sensor capable of ensuring the detection accuracy of inertia force.SOLUTION: The dynamic quantity sensor has a floating part 30, and an insulation film is formed over the upper plane thereof. Detection piezo-electric parts 42a to 42d are formed by laminating a lower electrode, a piezo-electric material, and an upper electrode in order on the insulation film. On the insulation film of the floating part, detection wiring 72, which is formed of a material identical to that of the lower electrode and is electrically connected to a detection piezo-electric part, is provided. The yield stress of the material forming the lower electrode is 70 MPa to 800 MPa.SELECTED DRAWING: Figure 1 |
