| 摘要 |
PROBLEM TO BE SOLVED: To produce a high surface modifying effect while reducing damage.SOLUTION: A method for producing a surface-modified polymer film (20) includes the steps of: installing a high-melting-point metal catalyst body (12) and a polymer film (10) in a vacuum container (11) so that they face each other; heating the high-melting-point metal catalyst body (12); and irradiating the polymer film (10) with radicals generated by bringing a mixed gas containing an alkylsilane, oxygen, and hydrogen into contact with the heated high-melting-point metal catalyst body (12). The step of irradiating the polymer film (10) with the radicals includes a step of forming an SiOCH layer (21) on the polymer film (10). The SiOCH layer (21) contains Si-C bonds, Si-O bonds, and Si-H bonds.SELECTED DRAWING: Figure 1 |
