METHOD FOR PRODUCING SILICON NITRIDE NANOFIBERS

摘要

The present invention relates to a method for producing silicon nitride nanofibers, the method being characterized by comprising: (a) a step for preparing Si(NH)2 through the gas-phase reaction of SiCl4 and NH3; (b) a step for preparing amorphous Si3N4 by thermally decomposing the prepared Si(NH)2; and (c) a step for producing crystalline silicon nitride nanofibers by performing a heat treatment on the prepared amorphous Si3N4 while changing a temperature-increasing rate in a non-oxidizing atmosphere, wherein the O content in the silicon nitride nanofibers is 2 wt% or less.