| 摘要 |
PROBLEM TO BE SOLVED: To prevent reduction in yield and quality of a microlens array substrate produced by laminating different inorganic materials.SOLUTION: A manufacturing method of a microlens array substrate, having a first area provided with recesses formed on a first surface of a substrate body and a second area provided with a flat surface formed on the first surface of the substrate body, includes the steps of: forming a silicon film over the second area of the first surface (S1, S2); forming a first oxide film to cover the silicon film (S3); forming a second oxide film between the silicon film and the first oxide film by heat-treating the silicon film in an atmosphere of gas containing oxygen, oxidizing the silicon film thereby (S4); and forming the recesses in the first area V1 of the first surface (S5, S6, S7).SELECTED DRAWING: Figure 5 |
