| 摘要 |
A medium support member includes a table having a top surface; an overlay placed on the top surface of the table, the overlay having a top surface and a bottom surface and a plurality of through-holes; a spacer array provided between the top surface of the table and the bottom surface of the overlay to define a gap between the table and the overlay, and at least one vacuum passage communicating with said gap for creating an underpressure in the gap, wherein at least portions of the overlay and corresponding portions of the table are held together by magnetic attraction. |
